| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16B7-0406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A01G9-128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A01G17-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A01G17-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2012-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99f53b4ee97efab38a4ee86cd578f889
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52a4a6c1f8f32c035b045045536d26c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_463604815ad46c5a42d691483534a681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18f61625737fc2e2c40cc15efc04be75 |
| publicationDate |
2014-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I466187-B |
| titleOfInvention |
Plasma processing method |
| priorityDate |
2011-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |