| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-332 |
| filingDate |
2008-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1d510780d2b2063922dc1e15dea2bc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f52336e5a09efd2f82e7cb4d443c1c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_586949c4cb1b3affac579a8410616bcb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c6b4c28fed33fa5db7c182b7644bf7d |
| publicationDate |
2014-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I449101-B |
| titleOfInvention |
Dry etching method |
| priorityDate |
2007-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |