| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate |
2007-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e0feac8876029d5c6a75b2ffc21b1ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1985a0897cf38ca28dccddae6a8fbcad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e56042125c8b1c08ef0d5ceba5a6e97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_918fa77202a97c9fcc5c2e106e9800f2 |
| publicationDate |
2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I401338-B |
| titleOfInvention |
Conductive resistance to plasma components |
| priorityDate |
2006-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |