| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76829
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate |
2005-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df84a452448a8906e5bcf5dda4233f77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_361325dcbc45d9488adb1b65627d3cb1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca78dc6711c45b55afd2391a4544809c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca30ccafadd4dc93bbe547f07eb5d89c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d89815d9dd346d8b6605a7cc7b87d77b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf60ec226a2b16d74a0d5c59bfebf4bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f11a3c48a34677b0b7abdd76fcc02104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_692558e9ac139db9690a1d7b1966e76a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a51684c4760ca34da9557fff586b1622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28e461e026535184df49b7e688e11c8c |
| publicationDate |
2013-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I400749-B |
| titleOfInvention |
Method for plasma stripping by periodic adjustment of gas chemistry and addition of hydrocarbons |
| priorityDate |
2004-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |