patent/TW-I384573-B

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-0037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
filingDate	2009-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2013-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37a9f76130f1313768cee7cd392496ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_240b7c4768ce8d51eec6168a58ef3562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67c78a3472dfaf4c325a3f77fc8453cc
publicationDate	2013-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	TW-I384573-B
titleOfInvention	Etching apparatus, analyzing apparatus, etching processing method, and etching processing program
priorityDate	2009-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006275892-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID83679 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520551

Total number of triples: 23.