| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32706 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2004-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3508da15d174a7a2f3329c6dad7c75cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f59b787d20ffe39b62c245ea71ceef1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23dc2fd8c287ff3e9825e5621a0e8f0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6e8275c42ee30c35333269ddace4740
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e2350d9bfc7bdc970e7cff5f928cdc9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e8724ee1234cde1b6996767a468c9aa |
| publicationDate |
2012-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I362685-B |
| titleOfInvention |
Plasma generation and control using a dual frequency rf source |
| priorityDate |
2003-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |