| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2006-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47d2f0ac50776cd855354c6369fa3ce9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e33833f30b7bf402b89f493539b4fe28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c58821d91527cdf4e24633049cb79b85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09f57a3e534de48ca5848d212106cdf1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46cfc2ca52f86c46c7dae83d1c0c270b |
| publicationDate |
2012-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I360176-B |
| priorityDate |
2006-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |