| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4aa076ec6ba2a73b90e6c1eda559f26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_524d51563b8950954ac02ccd83ab550f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7954830a2e6c89d5dd9028f67e591204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b6802ef95e3d1655e2228e408ea743f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3686dc5b3a5647f286cda801da425e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7360cad721737ec8057313302937dd8b |
| publicationDate |
2010-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I330869-B |
| titleOfInvention |
Method of recycling dummy wafer |
| priorityDate |
2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |