| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27D5-0068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32706
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2006-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8978cec7fc8f4102db95be64b4ec9a57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9d633ccaf5c468b2aa645ed14057b11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_faef64b35d95639e5febe3a70959c73f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c6a5ed949ad161a79895242b9b4e109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3d4e9610add36e0331d33f7a2950e27 |
| publicationDate |
2010-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I326468-B |
| titleOfInvention |
Plasma processing apparatus, plasma processing method, and tray |
| priorityDate |
2005-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |