http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I317539-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c9686b56e6cc9dc3f2c2ff4a71945643 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2004-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06ee459b49f3e4ae1fb478ec7d92d7a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83a3ae58411fce1c0b037b714278f3e1 |
| publicationDate | 2009-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I317539-B |
| titleOfInvention | End point detection in time division multiplexed etch process |
| priorityDate | 2003-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.