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filingDate 2003-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2005-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I229390-B
titleOfInvention Device structure of a MOSFET and method of forming the same
abstract A device structure of a MOSFET and a method of forming it are disclosed. The thickness of a portion of the gate dielectric layer of the MOSFET adjacent to the drain is increased to form a bird's beak structure. The gate-to-drain overlap capacitance is reduced by the bird's beak structure.
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