http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I226261-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-204 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8603 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8659 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68 |
| filingDate | 2002-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83d100a498dcb9cf0c92a648e09f175b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cb3ec7524060977a2d29acc0a4bdd98 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e69ce3dc6efcf37fe47a51771dd08e9a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63380385f24fe44e496da01ef0701087 |
| publicationDate | 2005-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I226261-B |
| titleOfInvention | Decomposing agent for sulfur fluorides and decomposing method |
| abstract | Provided is a decomposing agent and a decomposing method capable of decomposing, at a decomposing ratio of 99.9% or more, the sulfur fluorides such as SF6 and the like contained in the exhaust gas from a process for manufacturing semiconductor devices at a temperature lower than 1000 DEG C. The decomposing agent will not be deactivated in a short time, and no corrosive gases such as sulfur oxide, hydrogen fluoride and the like will be discharged. The decomposing agent comprises as active ingredients an aluminum compound and a lanthanoid compound, or the decomposing agent comprises as active ingredients an aluminum compound, a lanthanoid compound and an alkaline earth metal compound. Moreover, sulfur fluorides-containing gas is contacted with the decomposing agent under the heat, so that the sulfur fluorides are decomposed, or it is contacted with a decomposing agent comprising as active ingredient an aluminum oxide, and then is contacted with a decomposing agent comprising as active ingredients a lanthanoid oxide and an alkaline earth metal oxide. |
| priorityDate | 2001-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 100.