Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b6e46872fdbcf5b14a3e39c711e8f97 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3891 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5427 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-723 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-721 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02159 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0676 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-58092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28194 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0682 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02161 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
filingDate |
2002-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2004-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af711d558b6edb01318f0b187aa6beab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15c1bf37e61e4832a9276bb873423a58 |
publicationDate |
2004-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-574390-B |
titleOfInvention |
Hafnium silicide target for forming gate oxide film and method for preparation thereof |
abstract |
A hafnium silicide target is provided. The target is used for forming a gate oxide film composed of HfSi1.02-2.00. The target material is superior in workability and embrittlement resistance and is suitable for forming a HfSiO film and HfSiON film that may be used as a high dielectric gate insulation film in substitute for a SiO2 film. A method of manufacturing the above referenced hafnium silicide target is also provided. |
priorityDate |
2001-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |