| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44f82521bd7b49adba4be2e3e4f3b66a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-905 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32963
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-49 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2000-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1221f769e0d2e7b925f1be4519876af1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f752461c3b0e63f71c411bf52f9ffde
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad64eb4003574aacbf5489b61fe54f26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9467992417776e64c583c0e27a87ad6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7627862b90f5b877ade6bff81604e63a |
| publicationDate |
2001-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-469525-B |
| titleOfInvention |
Apparatus and method for detecting an end point of a cleaning process |
| abstract |
In a cleaning end point detecting apparatus for detecting an end point of a cleaning process in which contamination attached to an inner wall of a reaction chamber (1) is removed by introducing a cleaning gas into the reaction chamber to produce within the reaction chamber a cluster cloud resulting from reacting a part of the contamination with the cleaning gas and to detach the other part of the contamination from the inner wall as detached particles and by discharging the cluster cloud and the detached particles from the reaction chamber together with the cleaning gas, an irradiating unit (5) for irradiating a laser beam onto the cluster cloud and the detached particles within the reaction chamber to produce a scattered laser beam scattered by the cluster cloud and the detached particles. A monitoring unit (7) monitors the scattered laser beam as a two-dimensional image information. A judging unit (8) judges the end point of the cleaning process on the basis of the two-dimensional image information. Preferably, the judging unit judges, as the end point of the cleaning process, a time instant when not only the detached particles but also the cluster cloud is no longer detected on the basis of the two-dimensional image information. |
| priorityDate |
1999-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |