| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-151
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-389 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-38 |
| filingDate |
1999-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f271884df254f2c92a1f7a3d9b49aeba |
| publicationDate |
2000-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-409066-B |
| titleOfInvention |
Separation of CF4 and C2F6 from a perfluorocompound mixture |
| abstract |
A process for separating at least one of CF4 and C2F6 from a gas. The process includes the steps of: (a) contacting a gas mixture comprising (i) at least one of CF4 and C2F6, (ii) at least one of NF3, CHF3, and N2, and (iii) SF6 with a membrane at conditions effective to obtain a retentate stream rich in SF6 and at least one of CF4 and C2F6, and a permeate stream rich in at least one of NF3, CHF3, and N2; and (b) contacting the retentate stream with an adsorbent at conditions effective to absorb SF6 and produce a product stream rich in at least one of CF4 and C2F6. |
| priorityDate |
1998-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |