| abstract |
The present invention is a pre-bonding material for substrate processing, which is a pre-bonding material for substrate processing used to pre-bond a substrate to be processed on the back side to a support, and is characterized in that: relative to 100 parts of the total mass, the pre-bonding material contains 10 parts by mass or more and 100 parts by mass or less of polymers containing siloxane bonds with a weight average molecular weight of 3,000 or more and 700,000 or less by GPC, the aforementioned pre-bonding material has a first pre-bonding material layer and the aforementioned first pre-bonding For the second pre-adhesive material layer with different material layers, the minimum value of the shear viscosity of at least one of the aforementioned first pre-adhesive material layer and the aforementioned second pre-adhesive material layer is 1 Pa within the range of 130°C to 250°C ･S above 10,000Pa･s below. This provides: easy pre-bonding and peeling of the substrate and the support, quick pre-bonding material layer formation step, excellent dimensional stability and thermal process resistance, and a pre-bonding material for substrate processing that can improve the productivity of thin substrates, And the manufacturing method of the laminated body using the same. |