http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-202111104-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D17-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-34
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F11-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
filingDate 2020-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b88124143861870760c502c3d3045a8
publicationDate 2021-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202111104-A
titleOfInvention Treatment solution and treatment method
abstract The present invention provides a treatment solution and a treatment method for etching a first metal-containing material containing one or more first metals selected from the group consisting of Co and Cu while having excellent removability for removing target objects. The processing liquid of the present invention is a processing liquid used when processing a first metal-containing substance containing one or more first metals selected from the group consisting of Co and Cu, and the processing liquid contains etching The content of the organic solvent is 80% by mass or more relative to the total mass of the aforementioned treatment liquid, and the preservative is selected from one or more of the group consisting of compound X, compound Y, and compound Z Compound.
priorityDate 2019-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3866
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420453144
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID448893
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID30111
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11725
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420454520
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11073554
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397365
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12141
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID29420
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10130118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526901
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28145
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10038
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20083
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69582
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425724917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420494745
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67516
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID957
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14496
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8190
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488728
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408114405
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521682
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10434
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135889290
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451403949
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419565992
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474449
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411273156
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67803
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6857538
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415716906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448840407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474302
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94180
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412792978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14470
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421035517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426155427
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450994516
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID107202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419595401
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407330845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID97045
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421171852
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9250
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413416973
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10972
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412076115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410437773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12251
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8178
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419582727
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID971
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420450134
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452182873
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12228445
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451454455
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420501360
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31254
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449185545
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474345
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406954886
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419485715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7360
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530438
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7720
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490801
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408910843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76349
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419543653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419587512
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9793912
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414868559
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415794077
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420955467
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75103
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422094432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414875796
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411832430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524319
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10887879
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2733985
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22386
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10268
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520830
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8103
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451169937
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415028609
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457766247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422089649
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7058172
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5862
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516180
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457280508
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420268254
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419529093
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6425
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21863527
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487300
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8177
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578534
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421071957
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426285827
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19042707
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12511
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411138269
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8487
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12587
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164088
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID229722
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433771398
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419565814
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10960
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74976
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410538345
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419590337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419584633
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66984
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86079
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8697
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8133
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544893
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420211770
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451561990
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2334
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7866
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420591870
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415716843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6919
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425089494
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452789859
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406908050
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6915
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14057
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420549279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537837
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6992098
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22497
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8076
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8452
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID29980
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421245883
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID94226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521903
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419585207
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421226982
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53630274
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7859
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415968517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8134
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410493711
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID40895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449787175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57383916
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412630162
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421246104
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408516378
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID52948355
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425823261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425035971
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559463
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454435406
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID100165
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8146
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420431015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415144448
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID637922
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57233932
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487010
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8094
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID262
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6582
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID448071
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15286
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID465486770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10690
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11650
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2724141
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8019
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419594792
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422072053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14846
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421352388
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002

Total number of triples: 243.