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filingDate 2018-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2020-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-202008521-A
titleOfInvention Semiconductor device and manufacturing method thereof
abstract A semiconductor device includes a transistor having a source/drain and a gate. The semiconductor device also includes a conductive contact for the transistor. The conductive contact provides electrical connectivity to the source/drain or the gate of the transistor. The conductive contact includes a plurality of barrier layers. The barrier layers have different depths from one another.
priorityDate 2018-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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