http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201915213-A

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filingDate 2018-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33d22cbb5c9f3a3e61c635f6880fee59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99fd2ef261fab6f5b5bb42aed941b08f
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publicationDate 2019-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201915213-A
titleOfInvention Method for depositing metal chalcogenide on a substrate by cyclic deposition
abstract The invention discloses a method for depositing metal chalcogenide on a substrate by using cyclic deposition. The method may include contacting the substrate with at least one metal-containing gas-phase reactant and contacting the substrate with at least one chalcogen-containing gas-phase reactant. A semiconductor device structure including a metal chalcogenide deposited using the method of the present invention is also provided.
priorityDate 2017-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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