http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201821595-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f517051dd4d265e5e931724f45b34ddc
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78654
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66772
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
filingDate 2017-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaa242e86d826bf101ad0d1631229e05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79ddbb47402d6779bcb268354c481ca0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cd96f13135efa9a020d0d7236199c8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02aebc4657041164e8ec52b3c6f6ce26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3a74c547c337eefddf47be13c842488
publicationDate 2018-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201821595-A
titleOfInvention Etching composition
abstract An etching composition may include a peracetic acid mixture, a fluorine compound, an organic solvent (for example, an acetate-based organic solvent), and water. The etching composition can be used to selectively etch silicon-germanium (SiGe).
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10837115-B2
priorityDate 2016-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415788807
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410542568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517043
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93968
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6569
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7997
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID887
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8857
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5324276
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417109324
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508668
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538410
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559254
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422072380
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID167989
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426025815
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159578085
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9964072
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12348
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426031689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579469
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14935
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13693
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451208669
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415793762
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22020589
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10885939
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426223773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512365
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID77232
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86590530
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411327987
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4398339
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161221
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426074451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421922260
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23990
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159419
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447848874
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422009433
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13830
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394811
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545753
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410578103
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159654475
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453357195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67803
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419129972
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454984946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577789
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513958
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448670214
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87575
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61844
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453528079
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425553238
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525872
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91500
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15240839
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15659
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66110
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15771
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411317346
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451268575
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2733755
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454141638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454036387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862861
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408978442
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID522689
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419594084
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450866281
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1032
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490850
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14014
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458433298
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID90560
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71339323
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419588230
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6395
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414878626
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28118
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157973525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458434260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414878179
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327387
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11446417
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414867427
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448915161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406903350
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407378349
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID175
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406903349
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579323
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID518872
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4275592
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10911
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57451293
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448814046
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449185545
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6584
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452766734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID176
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21863527
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393345
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7904
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411932836
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160915377
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393356
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3587356
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5354076
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414811179
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71354225
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31272
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449935498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393347
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3776
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4389803
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217677
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2801745
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447580778
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448362446
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID124031258
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862563
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450408979
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451403949
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413352418
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166703
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413807576
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID517045
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451710367
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21864241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452441329
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521373
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13521
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519623
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22617361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523117
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217088
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4227894
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8164
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424382486
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454005604
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524931
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411295894
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3468413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579321
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23953
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414028576
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6585
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538408
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450973903
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451454455
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451732990
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524988

Total number of triples: 233.