| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate |
2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea0ac96f61e2222852f331ec0ed094e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d6af8dd7c0cc87e9165369a4681065f |
| publicationDate |
2017-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201734639-A |
| titleOfInvention |
Photosensitive ray- or radiation-sensitive composition, method for polishing sensitized ray-sensitive or radiation-sensitive composition, pattern forming method, and method for producing electronic device |
| abstract |
The present invention provides a method for purifying a sensitizing ray-sensitive or radiation-sensitive composition, a sensitizing ray-sensitive or a radiation-sensitive linear composition, which is excellent in resolution and having few residue defects, and includes the above-described sensitizing ray or sensation A pattern forming method for a method for purifying a radiation composition, and a method for producing an electronic device. The sensitizing ray-sensitive or radiation-sensitive composition containing a metal cation and a ligand is a sensitizing ray or a radiation-sensitive composition having a particle diameter of 0.15 μm or less and a liquid particle number of 10 or less in a composition of 1 mL. Things. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109806658-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109806658-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I668528-B |
| priorityDate |
2016-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |