http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109806658-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D36-00 |
| filingDate | 2017-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-109806658-B |
| titleOfInvention | Developing solution filtering system and method |
| abstract | A developing solution filtering system comprises a circulating filtering module and a second filter. The circulating filter module comprises a containing groove, at least one first filter and a fluid controller. The containing groove is selectively communicated with a developing solution supply groove and receives a developing solution from the developing solution supply groove. The at least one first filter is configured to filter the developing solution in a circulation loop of the circulation filtering module. The fluid controller is configured to selectively output the developing solution from the first filter to a detection stage. The second filter is arranged between the developing solution supply tank and the accommodating tank or between the fluid controller and the detection stage and is configured to filter the developing solution from the developing solution supply tank or from the first filter. The second filter comprises a high density polyethylene filter membrane. |
| priorityDate | 2017-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.