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filingDate 2014-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1dc0bcd06071920ae22e41df2da97836
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publicationDate 2015-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201511942-A
titleOfInvention Rare earth oxide anti-corrosion coating for semiconductor applications
abstract An article includes a body coated with a ceramic coating. The ceramic coating can include Y2O3 ranging from about 45 mole% to about 99 mole%, ZrO2 ranging from about 0 mole% to about 55 mole%, and ranging from about 0 mole%. Up to about 10 mol% of Al2O3. Or the ceramic coating may comprise Y2O3 ranging from about 30 mole% to about 60 mole%, ZrO2 ranging from about 0 mole% to about 20 mole%, and ranging from about 30 moles. % to about 60 mol% of Al2O3.
priorityDate 2013-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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