| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2013-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94879ef4d212a86d39c2a2c1e747f063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e37386558f6016f100c0f9502a55f58f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_845eac9d7d2f03ad8634abada0ada641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6d4f07dad217b74d3607afebe877455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_438b4a1faf22ae05de2e492912950822 |
| publicationDate |
2014-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201426855-A |
| titleOfInvention |
Differential ruthenium oxide etching |
| abstract |
A method of etching exposed yttrium oxide on a patterned heterostructure is described, and the method includes vapor phase etching resulting from remote plasma etching. The remote plasma excites the fluorine precursor. The plasma effluent from the remote plasma is streamed into the substrate processing zone and the plasma effluent is combined with water vapor in the substrate processing zone. The resulting reactant etches the patterned heterostructure to remove two separate distinct yttria regions at different etch rates. This method can be used to remove low density cerium oxide while removing less high density cerium oxide. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11699620-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I768093-B |
| priorityDate |
2012-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |