| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fbdc51c2665335e616caf341cdaa3d28 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0694
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2012-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8587f1dfced9522c8da951b8461280f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_755abd4326fe0d80071c660617c461af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83359118ceb3d2e9b8d0bb8284a99635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fa842fbe93167ab686490c33d4fa69f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64fab724d8875d49c3e10dcd676169af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_756b3d3d4119957602ba3c0e2ab9f180
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64427a325e565294855d6c86a2a46263 |
| publicationDate |
2014-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201417168-A |
| titleOfInvention |
Gas shower head for plasma processing chamber and coating forming method thereof |
| abstract |
The present invention discloses an enhanced coating for a gas showerhead for a plasma processing chamber. The reinforced coating is formed using plasma enhanced physical vapor deposition. The formation of the coating includes a physical process that concentrates the source material on the surface of the gas showerhead, and a chemical process in which the active component of the plasma reacts with the concentrated source material. Also, non-reactive components in the plasma bombard the surface of the gas showerhead to make the coating more compact. |
| priorityDate |
2012-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |