http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201348887-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4283a2f8ade5dc582d75300427a38e50 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0789 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0392 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C22-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28 |
| filingDate | 2013-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9858c9abb6c7bc96f50a334eaa5569ca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f72da74886f755243fffad7993ef714 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdf514c982f3c2e69a6cd1fb407a266c |
| publicationDate | 2013-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201348887-A |
| titleOfInvention | Resist adhesion improver and copper wiring manufacturing method |
| abstract | The present invention relates to a resist adhesion improving agent comprising 1.5 to 20% by weight of an organic acid, 0.0007 to 0.73% by weight of a chloride ion, 0.00003 to 3.7% by weight of an ammonium ion, and the remainder of the water, and the chloride ion is relatively a molar concentration ratio of ammonium ions in the range of 0.1 to 10; and a copper wiring manufacturing method for using a resist adhesion enhancer to a copper film when a photosensitive resist film is formed on a copper film After the surface is treated, a photosensitive resist film is formed on the copper film. Thereby, the adhesion of the photosensitive resist to the surface of the copper film is improved. |
| priorityDate | 2012-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.