| abstract |
An object of the present invention is to obtain a ceramic material having both corrosion resistance (plasma resistance) and mechanical strength. [Solution] It is a 3-phase composite ceramic having MgO, YAP (YAlO3), and spinel (MgAl2O4). This composite ceramic has higher plasma resistance than alumina and the same degree of plasma resistance as MgO. The mechanical properties of the composite ceramic such as hardness or bending strength are the same as or better than those of Al2O3. Raw material prices and manufacturing costs are lower than rare earth oxides. Further, by adding conductive particles, the electrical resistivity can be lowered. These composite ceramics are particularly useful as constituent members of semiconductor manufacturing apparatuses. |