| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2012-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1c7a03cc8169cd9ac88cdaf9eef2524
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_124605f184cacf24d1ec01748a229026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d3ef37f9d9d0980a24e405405467cb5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4adde77e253e0ec0c3499ce742e5cf29 |
| publicationDate |
2013-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201340203-A |
| titleOfInvention |
Semiconductor device manufacturing method |
| abstract |
The present invention relates to a method of fabricating a semiconductor device, comprising the steps of: forming a film, forming a tantalum nitride layer or a hafnium oxide layer, so that the tantalum nitride layer or the hafnium oxide layer is coated on the substrate and patterned. a sidewall portion of the germanium layer; and a plasma etching step of selectively removing the germanium-containing layer leaving a tantalum nitride layer or a tantalum oxide layer formed on the sidewall portion; and using an etching gas containing SF6 gas in the plasma etching step . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I806835-B |
| priorityDate |
2011-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |