| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-512
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0922
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823456
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7851
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-512
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-40114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66484
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2012-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca4318f121c638d648914ebd4da36c89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd43707012e2645520915492a0b5d66d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_404a7cc62e68fd4411507b653358c33d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a74b711ea7fe76a1a5e63b156ba0e5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_878c579e06c58a69a20d961ac35d4773 |
| publicationDate |
2013-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201334158-A |
| titleOfInvention |
Method for integrating multiple gate dielectric transistors in a three-gate (fin field effect transistor) process |
| abstract |
Described are two or more types of finned transistors having different gate structures and formed on a single integrated circuit. The gate structures for each type of transistor are distinguished by at least the thickness or composition of the gate dielectric layer or by a combination of work function metal layers in the gate electrode. Also provided is a method for fabricating an integrated circuit having at least two different types of finned transistors, wherein the types of transistors are by thickness and composition of the gate dielectric layer and/or It is distinguished by the thickness and composition of the work function metal in the gate electrode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I668745-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11335601-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11043572-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10573747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10229853-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10535746-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10032914-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10692771-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11424366-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10510896-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I647856-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10840379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437511-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10892192-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I620315-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I695509-B |
| priorityDate |
2011-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |