| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-35 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C22-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f071790a512b96cb47f532df6a2023f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2788d5a2f7878e5f69c215ab491cc3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ab4d0820d744bc26253061affd6dedc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44beb4e9bb8320caa3e0e6985c7dfe19 |
| publicationDate |
2013-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201330092-A |
| titleOfInvention |
System including a gas supply tube for coating and a method for applying a coating |
| abstract |
In one embodiment, a plasma etching system can include a processing gas source, a plasma processing chamber, and a gas supply tube. A plasma can be formed from a process gas formulation in one of the plasma processing chambers. The gas supply tube can comprise a corrosion resistant laminate structure that forms an internal formulation contact surface and an external environmental contact surface. The corrosion resistant laminate structure can include a protective germanium layer, a passivation coupling layer, and a stainless steel layer. The internal formulation contact surface can be formed by protecting the ruthenium layer. The passivation coupling layer can be disposed between the protective ruthenium layer and the stainless steel layer. The passivation coupling layer may comprise chromium oxide and iron oxide. The chromium oxide content in the passivation coupling layer is more abundant than that of iron oxide. |
| priorityDate |
2011-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |