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publicationDate 2012-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-201251005-A
titleOfInvention Method of manufacturing semiconductor device, and semiconductor device
abstract A method of manufacturing a semiconductor device in which the semiconductor layer comprises GaN (gallium nitride), the method comprising a gate insulating film formation step (F) in which a microwave plasma is used to form at least one film selected from a group consisting of an SiO2 film and an Al2O3 film upon a GaN-containing nitride layer, the formed film functioning at least in part as a gate insulating film.
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