| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B31-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2011-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8eec83ed76005093146dfd1437e2826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd303e45cbceb3dd7d6446538d9c23e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_056ef0e22b9cd3656d066d077f19d354
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c178f49a40294aa670201b7473eb7898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31a01ed65d3160a50f378c84dfae8ccd |
| publicationDate |
2012-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201229220-A |
| titleOfInvention |
Polishing composition and method for polishing semiconductor substrate using the same |
| abstract |
The present invention provides a polishing composition, including a polishing particle, at least one of alcohol compound selected from C2 to C6 aliphatic alcohols and C3 to C10 glycol ethers, at least one of alkaline compound selected from quaternary ammonium salts and alkali metal salts, and water. The polishing particle mentioned above has an average primary particle size of 5 to 50 nm. The amount of the above-mentioned alcohols of the polishing composition is 0.01 to 1 MS%. The polishing composition is mainly useful for polishing semiconductor substrate surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113001391-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I700358-B |
| priorityDate |
2010-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |