http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201220391-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2011-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4567fa4bea2dc906b8c2f765feb5c16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_912b77076736ed03bd1c238e3b140a0f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8e5922a20392d1bd4e9ac71de75c99f |
| publicationDate | 2012-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201220391-A |
| titleOfInvention | Apparatus for etching silicon-containing material |
| abstract | The purpose of the present invention is to improve uniformity of etching of a silicon-containing material. A substrate (9) to be processed, said substrate being coated with a silicon-containing material (9a), is supported on a virtual plane (PL), and the substrate is relatively moved in the transfer direction (x) with respect to a nozzle (30). A processing gas containing a fluorine-based reactive component is brought into contact with a substrate to be processed (9) by blowing out the processing gas from a blow out port (31) of the nozzle (30). The nozzle (30) extends in the width direction (y) that orthogonally intersects the transfer direction (x), and a cross-section that orthogonally intersects the width direction (y) is tapered toward the virtual plane (PL). The blow out port (31) is opened in the tip of the nozzle (30). A reaction field (1a) is defined between the tip of the nozzle (30) and the virtual plane (PL), and a diffusion space (1e) is defined between the tilted side surface (34) of the nozzle (30) and the virtual plane (PL). |
| priorityDate | 2010-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.