http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201209129-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2203-326 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09J7-02 |
| filingDate | 2011-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b057bb1d3d11cb06f283691529665aa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f870b2e96757d40c12be160dcc127a1 |
| publicationDate | 2012-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201209129-A |
| titleOfInvention | Thin sheet for formation of protection film on semiconductor wafer |
| abstract | The present invention provides a thin sheet for the formation of a protection film on a semiconductor wafer, which is used to form a protection film on a semiconductor wafer and is characterized by including a substrate film, a stripping film and protection film-forming layers disposed between said substrate film and said stripping film. In addition, said protection film-forming layers are formed on the surface of the substrate film at a prescribed interval. The diameter of each protection film-forming layer is smaller than that of the semiconductor wafer subject to the formation of the protection film by 100 μm to 5mm. After curing, the modulus of elasticity of said protection film-forming layer is 1 GPa to 20 GPa. By this way, this invention can provide a thin sheet for the formation of a protection film on a semiconductor wafer to perform optical orientation without contaminating the surface of an electric circuit on the wafer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I718112-B |
| priorityDate | 2010-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 116.