http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201200619-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_48de1cfdc993735cdc1c82f96827b33e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45551 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate | 2011-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c12b9da90a0c234c87982881ea116bd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f5297228c5b41d3c83353b27f2f6082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92de9c009dbbbfd3c018f035f324d3bd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d3a6d396f13e3339e9c58cabffbf788 |
| publicationDate | 2012-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201200619-A |
| titleOfInvention | Continuous patterned layer deposition |
| abstract | A method of manufacturing a substrate with a patterned layer of deposited material, the patterned layer being deposited from a processing head, the method comprising applying bearing gas from the processing head to keep the processing head hovering over the substrate on a gas bearing; moving the substrate and the hovering processing head relative to each other; applying a primer material for selective deposition of a deposition material to the substrate, the primer material being applied from a first area of a surface of the processing head that faces the substrate, and spatially patterning the primer on the substrate after or during application; applying the deposition material to the substrate from a second area of the surface of the processing head that faces the substrate, the second area lying downstream of the first area in a direction of the movement of the substrate relative to the processing head. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I601575-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9803281-B2 |
| priorityDate | 2010-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.