http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-201142941-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32155 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2010-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a013ebb9c77c9947f2b4ea1e4ddc0832 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_17674362bef5b2e79c8212a212fea4c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96ca5856e01878bcba84ca1a45ce8eff |
| publicationDate | 2011-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-201142941-A |
| titleOfInvention | Method of controlling trench microloading using plasma pulsing |
| abstract | Methods and apparatus for controlling microloading, such as within cell microloading between adjacent cells or isolated / dense microloading between areas of isolated or dense features during shallow trench isolation (STI) fabrication processes, or other trench fabrication processes, are provided herein. In some embodiments, a method for fabricating STI structures may include providing a substrate having a patterned mask layer formed thereon corresponding to one or more STI structures to be etched; etching the substrate through the patterned mask layer using a plasma formed from a process gas to form one or more STI structure recesses on the substrate; and pulsing the plasma for at least a portion of etching the substrate to control at least one of a depth or width of the one or more STI structure recesses. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I609990-B |
| priorityDate | 2010-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 57.