| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a44181db104c95ff0f95f6fffe42285c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00 |
| filingDate |
2010-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c61d8b9a11206732b94a03097db7955
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd19ab39d162a959bee96b3d5c12cf9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8df8a8ec4d615519acdff6604bd09b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c6a9ae2de118bd18f7f56035ae4b287 |
| publicationDate |
2011-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201142938-A |
| titleOfInvention |
Plasma resistant processing apparatus |
| abstract |
There is provided a processing apparatus undergoing various treatments using plasma and protected from plasma so as not to be damaged. The processing apparatus is one using plasma and having a protective layer comprising a fluorine-containing elastomer on the whole or a part of a surface exposed to plasma in the processing apparatus. |
| priorityDate |
2009-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |