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publicationDate 2009-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200926308-A
titleOfInvention Process for atomic layer deposition
abstract The present invention relates to a process of making thin film electronic components and devices, such as thin film transistors, environmental barrier layers, capacitors, insulators and bus lines, where most or all of the layers are made by an atmospheric atomic layer deposition process.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I506071-B
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