http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200903632-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2008-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_586949c4cb1b3affac579a8410616bcb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c6b4c28fed33fa5db7c182b7644bf7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d17f1521142763769fe2419433e39b5c |
| publicationDate | 2009-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200903632-A |
| titleOfInvention | Dry etching apparatus and dry etching method |
| abstract | Disclosed are a dry etching apparatus and a dry etching method, each realizes high in-plane uniformity and high etching rate. Specifically disclosed is a dry etching apparatus comprising a vacuum chamber composed of an upper plasma generating chamber and a lower substrate processing chamber, a magnetic field coil arranged outside the side wall of the plasma generating chamber, an antenna coil arranged between the magnetic field coil and the outer surface of the side wall and connected to a high-frequency power supply, and an etching gas-introducing means arranged above the plasma generating chamber. In this dry etching apparatus, the side wall is made of a material having a relative dielectric constant of not less than 4. |
| priorityDate | 2007-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.