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filingDate 2007-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f15aa67a7e04f15d2ac44e8bc6022971
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publicationDate 2008-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200808145-A
titleOfInvention Process for producing copper wiring polyimide film and copper wiring polyimide film
abstract This invention discloses a copper wiring polyimide film of extremely small pitch and excellent linearity. This invention provides a process for producing the copper wiring polyimide film, in which copper wiring polyimide film including a copper wiring section having a pitch of 20 to 45 μm is produced using a copper foil laminated polyimide film with carrier by means of a semi-additive method. This process includes the steps of: (a) preparing a copper foil laminated film by laminating, on a surface of a polyimide film, a copper foil having a surface roughness Rz of 1.0 μm or less and a thickness of 0.5 μm to 2 μm on a film side surface thereof; (b) forming, on an upper surface of the copper foil, a layer of plating resist pattern that can form a wiring pattern having a pitch of 20 to 45 μm; (c) Conducting copper plating on a portion of the copper foil exposed from the resist; (d) removing the plated resist; (e) removing the copper foil exposed from the part where the plated resist has been removed so as to expose the polyimide film.
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