| abstract |
FIELD: electrical engineering.SUBSTANCE: invention relates to the field of electrical engineering, namely to a completely solid-state thin-film source of electric current, in particular to a thin-film pseudo capacitor with solid inorganic Li+-ionic electrolyte, intended for use in various microelectronic devices, for example in subminiature accumulators of electric energy for medical devices. Electrochemical power supply source comprises substrate, two thin-layer collectors, two buffer-accumulating layers, layer of solid-state electrolyte, wherein each buffer-accumulation layer is a layer of composition LiXMYO3, where element M is selected from Nb, Ta, Ti or V, x is in range from 0.8 to 1.4, and y is from 1.2 to 0.6. Besides, the solid-state power supply may additionally contain at least one Faraday layer. Buffer-accumulating layers with thickness of 15–1000 nm, solid-state electrolyte with thickness of 150–1000 nm, as well as Faraday layer with thickness of 100–1000 nm are obtained using magnetron sputtering.EFFECT: disclosed thin-film electric current source or pseudo-capacitor has high specific power, long service life, up to 100,000 cycles in operating temperature range from -50 °C to +150 °C, which is technical result of invention.20 cl, 18 dwg, 18 ex |