| abstract |
The microballoon of this invention is a microballoon containing polyurethane (urea), It has an ionic group on the inner surface of this microballoon, It is a microballoon characterized by the above-mentioned. ADVANTAGE OF THE INVENTION According to this invention, the affinity with a polishing slurry liquid is improved by using for a CMP polishing pad, and it can provide the microballoon which can express favorable polishing characteristics without lowering the intensity|strength of resin of a polishing pad. |