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filingDate 2020-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2022-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20220078281-A
titleOfInvention Hard mask including amorphous boron nitride film and method of fabricating the hardmask, and patterning method using the hard mask
abstract Disclosed are a hard mask including an amorphous boron nitride film, a manufacturing method thereof, and a patterning method using the hard mask. The disclosed hard mask is provided on a substrate and used in a process of patterning the substrate, and includes an amorphous boron nitride film.
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