| abstract |
In the present embodiments, by forming a high dielectric constant oxide insulating layer doped with metal ions without using vacuum equipment when forming the insulating layer, a wide range of temperatures can be sensed in low voltage and high frequency regions, and operation stability even in a bending state is improved. Provided are a flexible temperature sensor that can be maintained, an arm-band type flexible temperature sensor system based on the same, and a manufacturing method thereof. |