Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-06 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30 |
filingDate |
2019-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb2319e4faff68720cefda4949027d29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06aa09484cb3ad21f9dadb918955407f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0567f729610e08a08cdb5fd169ae1834 |
publicationDate |
2021-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20210075150-A |
titleOfInvention |
Etching liquid composition and etching method |
abstract |
An etching solution composition for a silver-containing material capable of etching a silver-containing material at a higher speed and capable of forming a thin line with a small width in the abdomen, and an etching method using the same. It is an etching method which has an etching liquid composition used in order to etch a silver containing material, and the process of etching a silver containing material using this etching liquid composition. Etching liquid composition contains (A) 0.1-30 mass % of hydrogen peroxides, (B) 0.05-60 mass % of organic carboxylates, and water, and pH is 2.5 or more. |
priorityDate |
2018-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |