| abstract |
According to an embodiment of the present invention, a method of manufacturing an electrode active material that can be used in a secondary battery is provided. A method of manufacturing an electrode active material according to an embodiment of the present invention includes a step of preparing a base material for preparing a plate-shaped graphite material, a step of forming a coating layer for forming a coating layer containing silicon on the prepared plate-shaped graphite material, and And a spheronization step of reassembling by grinding or polishing through a mechanical device, and the coating layer forming step is SiH 4 , Si 2 H 6 , Si 3 H 8 , SiCl 4 , SiHCl 3 , Si2Cl 6 , SiH 2 Cl 2 , It may be configured to perform deposition while supplying at least one source gas of SiH 3 Cl and an auxiliary gas including carbon together to form a coating layer of a composite material in which silicon and carbon are mixed on the surface of the plate-shaped graphite material. |