| abstract |
LER provides an excellent actinic ray-sensitive or radiation-sensitive resin composition. In addition, a resist film, a pattern forming method, and a method of manufacturing an electronic device using the actinic ray-sensitive or radiation-sensitive resin composition are provided. An actinic ray-sensitive or radiation-sensitive compound containing a compound that generates an acid upon irradiation with actinic rays or radiation and a resin whose polarity increases by the action of the acid, and the compound is represented by a specific general formula (X). Resin composition. |