| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a7e45a761824e6b2727d038a20769dd6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2018-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b05376e84fddd5e4c6cfb8275fae1b20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb4bd82d679e084b5003580b044f58e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_298cc55a68d6d123152096ec17c8d43d |
| publicationDate |
2020-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200020699-A |
| titleOfInvention |
Oxidizing Fluids for Chemical Mechanical Polishing of Ceramic Materials |
| abstract |
The present disclosure relates to fluid compositions that can be used in the chemical mechanical polishing process of inorganic materials. The fluid composition may comprise at least one oxidant and a polyvalent cation component. Using the fluid composition during the chemical mechanical polishing process may enable a relatively defect free material surface after polishing while achieving a suitable material removal rate. |
| priorityDate |
2017-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |