| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33c922e05f6133b7d72dbb849d77487d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2438-03 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-1408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F228-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F293-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F228-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2018-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a1567b31ca8000445afc89665cb3a90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c9d7eb76d8b9bf4591fc16cabc2d70b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c08690b88b3bd4af83bbb55f92e620f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6f35864e332169de3b5083d77416c86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_520eae651bbb0a3bd7b20baa494c2619 |
| publicationDate |
2020-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200020228-A |
| titleOfInvention |
Preparation method of substrate |
| abstract |
The present application relates to a method for producing a substrate. The present application can provide a method for manufacturing a substrate in which contact / via holes are formed without minimizing the diameter or shape of the hole while miniaturizing to meet the high integration demand. |
| priorityDate |
2018-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |