http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200009659-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bd3cc3c169eb80c23d5d53984fe68da |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-818 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-32 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-32 |
| filingDate | 2018-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11bd8627007ed4c3dce100999a5a3eb1 |
| publicationDate | 2020-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20200009659-A |
| titleOfInvention | Processing apparatus of exhaust gas |
| abstract | The present invention relates to an exhaust gas treating apparatus capable of purifying exhaust gas discharged from a substrate processing apparatus and the like, the exhaust gas purifying unit being connected to a chamber to purify the exhaust gas; And a foreign material collecting unit collecting foreign matters generated by the exhaust gas purifying unit, wherein the foreign matter collecting unit is installed in communication with the exhaust gas purifying unit and firstly receives the foreign matter; A second accommodating part installed in communication with the first accommodating part and accommodating the foreign material secondly to discharge the foreign matter contained in the first accommodating part to the outside; And a first blocking device installed between the first accommodating part and the second accommodating part. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102522018-B1 |
| priorityDate | 2018-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.